
以及用于相应的器件制造工艺的设备的研究和开发,整个过程 或由客户提供 它提供代工服务的完整的产品开发过程,包括设计和定制开发.
Mass product or coordinator for power devices form wafer in to wafer out total solution
| 艺术 | 
|---|
| Front-end processing | 
| Photolithography resolution down to 0.4 µm feature with 0.1µm alignment accuracy | 
| Trench technology down to 3um depth without micro trench | 
| Thermal oxidation and gate stack processes | 
| Films deposition and etch | 
| High temperature implant | 
| High temperature implant anneal | 
| Metallization | 
| Backside metal deposition | 
| Ni, Al, Ti/TiN Ag deposition and etch | 
| Semiconductor device and test patterns | 
| Fabrication of test structures | 
| Manufacturing of semiconductor devices | 
| Characterization | 
| Inline parametric and reliability electrical testing and characterization | 
| 设施 | 
|---|
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| 6-inch SiC processing capabilities | 
| Class-10 capable cleanroom | 
| Custom development and manufacturing |