以及用于相应的器件制造工艺的设备的研究和开发,整个过程 或由客户提供 它提供代工服务的完整的产品开发过程,包括设计和定制开发.
Mass product or coordinator for power devices form wafer in to wafer out total solution
艺术 |
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Front-end processing |
Photolithography resolution down to 0.4 µm feature with 0.1µm alignment accuracy |
Trench technology down to 3um depth without micro trench |
Thermal oxidation and gate stack processes |
Films deposition and etch |
High temperature implant |
High temperature implant anneal |
Metallization |
Backside metal deposition |
Ni, Al, Ti/TiN Ag deposition and etch |
Semiconductor device and test patterns |
Fabrication of test structures |
Manufacturing of semiconductor devices |
Characterization |
Inline parametric and reliability electrical testing and characterization |
设施 |
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6-inch SiC processing capabilities |
Class-10 capable cleanroom |
Custom development and manufacturing |